Journal of Plasma and Fusion Research
Print ISSN : 0918-7928
Developments of Basic Researches on Fluorocarbon Plasmas for Material Processing 2.Beam Experiments on Radical Production in Gas Phase and on Solid Surface
Hirotaka TOYODA, Hideo SUGAI
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Keywords: fluorocarbon gas, dissociative ionization cross section, radical production cross section, surface reaction
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1999 Volume 75 Issue 7 Pages 779-784

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Abstract
Cross sections of electron-impact dissociative ionization and neutral radical production from fluorocarbon molecules or neutral radicals are reviewed. In addition, positive and negative ion production on solid surfaces bombarded by fluorocarbon ion beams are reviewed.
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© 1999 by The Japan Society of Plasma Science and Nuclear Fusion Research
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