Numerical Simulation Research in Plasma Technologies 2. Basic Properties of Low Temperature Plasma Discharges

Abstract

In this article, we deal with weakly ionized gas discharges as low temperature plasmas. First, the electron swarm theory is outlined in order to bring the electron behavior in such plasmas into relief, which highlights similarity law and hydrodynamic regime as a specific nature of electron avalanche in static electric fields. Next, a study of electron dynamics in a high frequency electric field ranging from 100 MHz to 1 GHz is presented to show a coupling analysis associated with Maxwell’s equations and the Langevin equation. With the help of a Monte Carlo simulation for electrons, this analysis enables us to estimate the depth of energy injection from the oscillating external field to plasma reactors. A simple self-consistent scheme to investigate the ignition process of the high frequency plasmas is also suggested.