Journal of Plasma and Fusion Research
Print ISSN : 0918-7928
Lecture Note : Invitation to the World of the Plasma for Light Sources
Invitation to the World of the Plasma for Light Sources 4.Light Source for 21st Century 4.3 New Application by a Lamp (by Excimer Lamp)
Nobuyuki HISHINUMA
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Keywords: dielectric barrier discharge, excimerlamp, vacuum ultraviolet, static eraser, photo CVD, contact angle, surface improvement
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2005 Volume 81 Issue 12 Pages 1012-1015

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Abstract
There are many lamp applications according to each spectrum characteristics. Ultraviolet radiation lamp is used for lithography, curing and medicals. In this paper, Excimer lamp is introduced and its applications are described.
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© 2005 by The Japan Society of Plasma Science and Nuclear Fusion Research
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