Present and Future of Semiconductor Pulsed Power Generator ˜Role of Power Semiconductor Devices in Plasma Research˜ 2.Application of All Solid-State Pulsed Power Generators to Equipment Using Plasmas

Abstract

Recently, high-repetition-rate all-solid-state pulsed power generators with long life time and high reliability, have been developed for industrial applications with plasmas, such as high-repetition-rate pulsed gas lasers, high energy density plasma (EUV sources) and water discharges. Nowadays, power semiconductor device technology can improve the performance of fast and high-power switching devices. In practical systems, however, semiconductor switches are used with the assistance of magnetic switches because the semiconductor switches are not capable of driving the usual generators by themselves. These generators consist of semiconductor switches, step-up pulse transformers and magnetic switches. Progress of all-solid-state pulsed power generators is reviewed with particular emphasis on industrial applications with plasmas.