Present Status and Issues of Carbon Nanotubes Alighned Growth Using Plasma Process 4. Synthesis of Aligned Single-Walled Carbon Nanotubes by Point-Arc Microwave Plasma Chemical Vapor Deposition

Abstract

It is very important to control the growth orientation of carbon nanotubes (CNTs) on substrates for applications such as field emission devices and CNT-based FETs. Although chemical vapor deposition (CVD) is the most reliable means to this end, there have been few reports on the synthesis of vertically aligned single-walled carbon nanotubes (SWNTs) using the CVD method. In this study, we demonstrate the low temperature synthesis of extremelydense and vertically aligned SWNTs deposited by point-arc microwave plasma CVD.