Abstract
Plasma production was studied using a 1 KW 130 MNz electromagnetic wave, a coupling coil placed in a metal vacuum-chamber, and a uniform magnetic field. Plasma densities higher than 1012 cm-3 were obtained in helium for gas pressures above about 10-3 torr. The ion-and electron-temperature reached 25 eV near the magnetic field strength satisfying the condition for the occurrence of lower hybrid resonance. There the efficiency for power transfer was estimated to be several tens of percent.
