Abstract
Incidence angle dependences of secondary electron emission from a carbon surface by low energy electron and hydrogen atom are calculated using Monte Carlo simulations on the kinetic emission model. The calculation shows very small increase or rather decrease of the secondary electron yield with oblique incidence. It is explained in terms of not only multiple elastic collisions of incident particles with the carbon atoms but also small penetration depth of the particles comparable with the escape depth of secondary electrons. In addition, the two types of secondary electron emission are distinguished by using the secondary electron yield statistics; one is the emission due to trapped particles in the carbon, and the other is that due to backscattered particles. The high-yield component of the statistics on oblique incidence is more suppressed than those on normal incidence.
