Simulations on Electron Orbits in Magnetron Sputtering Systems

Abstract

The motions of electrons are traced in magnetic and electric fields of magnetron sputtering systems.Electrons are emitted from a target cathode and show drift motions resulting in generation of plasmas. Collisions between electrons and neutral gas atoms of Ar are examined by using Monte Carlo method.Ionization points are used to calculate sputtering rate on a target. The calculated profiles of sputtering rate show good agreement with the erosion profiles measured in experiments.