Abstract
For the study and development of surface modification of vacuum materials, we have successfully fabricated a device which can be used to measure the friction force in a vacuum. Surface modifications by mechanical polishing, chemical polishing and electrochemical buffing were carried out on the surfaces of 304 type stainless steel sheet substrates. TiN or a mixture of Cu and BN was coated on the steel using rf magnetron sputtering deposition. Each of the surface modified samples shows a different friction coefficients, reflecting the different surface treatment. The sample coated with the mixture of Cu and BN has the lowest and stable friction coefficients that does not vary with pressure decrease.
