Observation of Energy-filtered Images and Energy Dispersive Images of Au/Ta Photoelectron by EXPEEM with a Wien Filter Type Energy Analyzer

Abstract

EXPEEM (energy-selected X-ray photoemission electron microscopy) has a potential to give surface chemical mapping by analyzing the X-ray photoelectron kinetic energies. We have successfully observed EXPEEM images of Au islands deposited on a Ta substrate by using a Wien filter type energy analyzer and an undulator synchrotron radiation with a photon energy as high as 2300 eV. The energy and spatial resolution of the EXPEEM were estimated to be 1 eV and 1.6 μm, respectively.