Special Issue on Estimation of Inevitable Degradation in Surface Analysis
Specimen Damage in EPMA/SEM
2004 Volume 25 Issue 4 Pages 224-231
Details
2004 Volume 25 Issue 4 Pages 224-231
Specimen damage due to electron beam irradiation is a serious problem for EPMA/SEM observation, which is caused by heat produced in the process of inelastic scattering of incident electrons. The produced heat is in proportion to the specimen current and accelerating voltage and is in inverse proportion to the beam diameter. The thin film method using this substrates for the soft materials is effective to avoid the electron beam damage. Several effective methods to suppress the specimen damage are presented and discussed by using real examples.
