Abstract
About 40 years have passed, since commercial surface analyses instruments for electron spectroscopy appeared, and these instruments are now widely used in production lines as well as research fields. Since 1982, many international research projects have been executed under VAMAS umbrella, and a lot of information has been obtained to improve the reliability of surface analyses. In 1991, ISO TC201 was established to achieve the standardization of surface chemical analyses, and 38 ISO standards have been published. In this paper, the research results on the improvement of the reliability of electron spectroscopy are introduced, and the ISO standards directly relating to the electron spectroscopy are explained.
