Abstract
Atomically flat oxide single crystals, some of which have now become commercially available, are getting more and more important today. It is because they can provide a useful platform not only in high-quality oxide epitaxy and its device applications, but also in fundamental investigations of oxide surface science. In this review, I summarize some of the wet processes that have made a breakthrough in the preparation of such an atomically flat oxide single crystal surface, focusing on the chemistry involved in these wet processes. It includes those of TiO2 and MgO(001) oxide single crystals, and the benefits we can get from the use of these atomically flat oxide single crystals are also displayed.
