Electrical Properties of Liquid Phase Sensor Using Rayleigh Type Surface Acoustic Wave

Abstract

A surface acoustic wave (SAW) is a wave propagating in which the wave energy concentrates on the piezoelectric material surface. Among various surface wave modes, Rayleigh wave radiates a wave along to surface. Thus, surface sensitive monitoring is expected especially in liquid/solid interface. In this study, the device of which a grooved glass is placed on the propagation path of Rayleigh wave are fabricated and demonstrates the sensing properties to detect the mass concentration of glycerin, alcohols and NaCl in a liquid.