Abstract
Polarization tool as ellipsometry is a classic but still new technology. It is used in various fields : from materials science, such as the newest nanotechnology and optical function material, to biotechnology in recent years. It has been developing into the new areas, called polarization science and polarization technology. This paper reviews a measurement method for spectroscopic Mueller matrix such as a dual rotating retarder type polarimeter, a liquid crystal phase modulation type polarimeter, and a channeled spectrum polarimeter. In addition, the important analysis is introduced for equipment calibration and a decomposition method from obtained Mueller matrix.
