Energetic-particle-sold Interactions and Applications to Surface Analysis

Abstract

Ion scattering spectrometry has been widely used in materials analysis of thin films and atomic structures near surface regions. The notable point of this method is its reliability due to the simple and well-established principle and direct observation in real space, in contrast to diffraction (momentum space) techniques using electrons and X-rays. This article first represents the physical basis of ion scattering analysis and then introduces a recent topic of nano-particles analysis, i.e. determination of the shape and size of Au nano-particles and Au-Pd core cells.