Spectrum Analysis of Medium Energy Ion Scattering

Abstract

Medium energy ion scattering is a simple and powerful technique for determining surface compositions and surface atomic structures. Two methods are mainly used for simulation. The first method is to virtually divide the sample into thin layers and add the scattering spectra from each layer. This can be treated as an extension of the simulation of Rutherford backscattering analysis except for factors of ionization probability, spectral shape and scattering cross section. The second method is to calculate the probabilities of incident ions hitting to the target atoms by performing trajectory simulation of incident ions in the crystal. This paper briefly describes the items needed for both the simulations of medium energy ion scattering.