Use of Surface Hydrogen in Si Surface Cleaning and Si Epitaxy HF/UVOC and Silane ALE

Hyomen Kagaku

Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321

Use of Surface Hydrogen in Si Surface Cleaning and Si Epitaxy

HF/UVOC and Silane ALE

Maki SUEMITSU

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JOURNAL FREE ACCESS

1992 Volume 13 Issue 6 Pages 332-338

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Abstract

[in Japanese]

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