Dynamical Simulation of Binary Alloy Sputtering

Yasunori YAMAMURA

doi:10.1380/jsssj.14.591

Yasunori YAMAMURA

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JOURNAL FREE ACCESS

1993 Volume 14 Issue 10 Pages 591-596

DOI https://doi.org/10.1380/jsssj.14.591

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Published: December 10, 1993 Received: May 19, 1993 Available on J-STAGE: August 07, 2009 Accepted: May 19, 1993 Advance online publication: - Revised: -
Correction information
Date of correction: August 07, 2009 Reason for correction: - Correction: CITATION Details: Wrong : 1) G. K. Wehner : “Methods of Surface Analysis” (ed. A. W. Czanderna, Elsevier, New York, 1975) Chap. 1.
2) G. Betz and G. K. Wehner : “Sputtering by Particle Bombardment II” (ed. R. Behrisch, Springer, 1983) p. 11.
3) H. H. Andersen : “Ion Implantation and Beam Processing” (eds. J. S. Williams and J. M. Poate, Academic Press, 1984) p. 127.
4) “Surface Segregation Phenomena” (eds. P. A. Dowben and A. Miller, CRC Press, Boston, 1991).
5) W. Eckstein and W. Möler : Nucl. Instrum. Methods B 7/8, 727 (1985).
6) R. Kelly: Surf. Sci. 100, 85 (1980).
7) H. Shimizu, M. Ono, N. Koyama and Y. Ishita : J. Appl. Phys. 53, 3044 (1982).
8) R. S. Li, T. Koshikawa and K. Goto : Surf. Sci. 121, 1561 (1982).
9) P. S. Ho : Surf. Sci. 72, 253 (1978).
10) D. G. Schwartzfager, S. B. Ziemecki and M. J. Kelly: J. Vac. Sci. Technol. 19, 185 (1981).
11) N. Itoh and K. Morita : Radiat. Eff. 80, 164 (1984).
12) W. Eckstein and J. P. Biersack : Appl. Phys. A 37, 95 (1985).
13) M. Hou and W. Eckstein : Nucl. Instrum. Methods B13, 324 (1986).
14) Y. Yamamura and Y. Mizuno : IPPJ-AM-40. Inst. Plasma Physics. Nagoya Univ. (1985).
15) W. Möler and W. Eckstein : Nucl. Instrum. Methods B2, 799 (1984).
16) M. L. Roush, T. S. Andreadis and O. F. Goktepe : Radiat. Eff. 55, 119 (1981).
17) Y. Yamamura : Nucl. Instrum. Methods. B 28, 17 (1987).
18) H. J. Kang, J. H. Kim, Y. S. Kim, D. W. Moon and R. Shimizu : Surf. Sci. 226, 93 (1990).
19) K. L. Wilson and M. I. Baskes : J. Nucl. Mater. 76/77, 291 (1978).
20) J. du Plessis and E. Taglauer : Surf. Sci 260, 355 (1992).
21) J. du Plessis, G. N. Van Wyk and E. Tagauer : Surf. Sci. 381 (1989).
22) T. Takiguchi, M. Ishida and Y. Yamamura : Rad. Eff. Crystal Defects (in press).
23) D. T. Ling, J. N. Miller, I.Lindau, W. E. Spicer and P. M. Stefan : Surf. Sci. 74, 612 (1978).
24) A. Kurokawa, H. J. Lee and R. Shimizu : Surf. Sci. 255, 120 (1991).

Right : 1) G. K. Wehner : “Methods of Surface Analysis” (ed. A. W. Czanderna, Elsevier, New York, 1975) Chap. 1.
2) G. Betz and G. K. Wehner : “Sputtering by Particle Bombardment II” (ed. R. Behrisch, Springer, 1983) p. 11.
3) H. H. Andersen : “Ion Implantation and Beam Processing” (eds. J. S. Williams and J. M. Poate, Academic Press, 1984) p. 127.
4) “Surface Segregation Phenomena” (eds. P. A. Dowben and A. Miller, CRC Press, Boston, 1991).
5) W. Eckstein and W. Möler : Nucl. Instrum. Methods B 7/8, 727 (1985).
6) R. Kelly: Surf. Sci. 100, 85 (1980).
7) H. Shimizu, M. Ono, N. Koyama and Y. Ishita : J. Appl. Phys. 53, 3044 (1982).
8) R. S. Li, T. Koshikawa and K. Goto : Surf. Sci. 121, 1561 (1982).
9) P. S. Ho : Surf. Sci. 72, 253 (1978).
10) D. G. Schwartzfager, S. B. Ziemecki and M. J. Kelly: J. Vac. Sci. Technol. 19, 185 (1981).
11) N. Itoh and K. Morita : Radiat. Eff. 80, 164 (1984).
12) W. Eckstein and J. P. Biersack : Appl. Phys. A 37, 95 (1985).
13) M. Hou and W. Eckstein : Nucl. Instrum. Methods B13, 324 (1986).
14) Y. Yamamura and Y. Mizuno : IPPJ-AM-40. Inst. Plasma Physics. Nagoya Univ. (1985).
15) W. Möler and W. Eckstein : Nucl. Instrum. Methods B2, 799 (1984).
16) M. L. Roush, T. S. Andreadis and O. F. Goktepe : Radiat. Eff. 55, 119 (1981).
17) Y. Yamamura : Nucl. Instrum. Methods. B 28, 17 (1987).
18) H. J. Kang, J. H. Kim, Y. S. Kim, D. W. Moon and R. Shimizu : Surf. Sci. 226, 93 (1990).
19) K. L. Wilson and M. I. Baskes : J. Nucl. Mater. 76/77, 291 (1978).
20) J. du Plessis and E. Taglauer : Surf. Sci 260, 355 (1992).
21) J. du Plessis, G. N. Van Wyk and E. Tagauer : Surf. Sci. 381 (1989).
22) T. Takiguchi, M. Ishida and Y. Yamamura : Rad. Eff. Crystal Defects (in press).
23) D. T. Ling, J. N. Miller, I.Lindau, W. E. Spicer and P. M. Stefan : Surf. Sci. 74, 612 (1978).
24) A. Kurokawa, H. J. Lee and R. Shimizu : Surf. Sci. 255, 120 (1991).

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