A New and Practical Energy Calibration Method Using Spectrometer Offset Function in Auger Electron Spectroscopy

Daisuke FUJITA; Kazuhiro YOSHIHARA

doi:10.1380/jsssj.14.429

Daisuke FUJITA, Kazuhiro YOSHIHARA

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JOURNAL FREE ACCESS

1993 Volume 14 Issue 7 Pages 429-435

DOI https://doi.org/10.1380/jsssj.14.429

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Published: September 10, 1993 Received: April 15, 1993 Available on J-STAGE: August 07, 2009 Accepted: May 20, 1993 Advance online publication: - Revised: -
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Date of correction: August 07, 2009 Reason for correction: - Correction: ABSTRACT Details: Wrong : A practical and simple calibration procedure for determining the energy scale in Auger electron spectroscopy (AES) by using a newly developed idea of a spectrometer offset function is proposed here. This method enables transformation of the uncalibrated energy scale to be the calibrated and Fermi-level-referenced ones. The reliability of the calibrated energy scale can be estimated by the standard error of least-square fitting of the spectrometer offset function to the experimental values. A round-robin test involving the different kinds of twelve spectrometers has been conducted to clarify the effectiveness of this calibration method. Compared with the Fermi-level-referenced kinetic energies of Ni L₃VV and M₃VV, the scatter of these calibration-corrected peak positions is found to be very low, amounting to 20&sim;30% of the scatter of uncorrected values. It is also found that the spectrometers with the higher energy resolution tend to have the lower standard errors. These results clearly suggest that this procedure is very useful for the practical calibration of AES energy scale.
Right : A practical and simple calibration procedure for determining the energy scale in Auger electron spectroscopy (AES) by using a newly developed idea of a spectrometer offset function is proposed here. This method enables transformation of the uncalibrated energy scale to be the calibrated and Fermi-level-referenced ones. The reliability of the calibrated energy scale can be estimated by the standard error of least-square fitting of the spectrometer offset function to the experimental values. A round-robin test involving the different kinds of twelve spectrometers has been conducted to clarify the effectiveness of this calibration method. Compared with the Fermi-level-referenced kinetic energies of Ni L₃VV and M₃VV, the scatter of these calibration-corrected peak positions is found to be very low, amounting to 20∼30% of the scatter of uncorrected values. It is also found that the spectrometers with the higher energy resolution tend to have the lower standard errors. These results clearly suggest that this procedure is very useful for the practical calibration of AES energy scale.

Abstract

A practical and simple calibration procedure for determining the energy scale in Auger electron spectroscopy (AES) by using a newly developed idea of a spectrometer offset function is proposed here. This method enables transformation of the uncalibrated energy scale to be the calibrated and Fermi-level-referenced ones. The reliability of the calibrated energy scale can be estimated by the standard error of least-square fitting of the spectrometer offset function to the experimental values. A round-robin test involving the different kinds of twelve spectrometers has been conducted to clarify the effectiveness of this calibration method. Compared with the Fermi-level-referenced kinetic energies of Ni L₃VV and M₃VV, the scatter of these calibration-corrected peak positions is found to be very low, amounting to 20∼30% of the scatter of uncorrected values. It is also found that the spectrometers with the higher energy resolution tend to have the lower standard errors. These results clearly suggest that this procedure is very useful for the practical calibration of AES energy scale.

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