Abstract
For the first step toward sharing the Auger spectra obtained by using different types of instruments, the round robin on the energy dependence of sensitivity of Auger electron spectrometer has been made. Participants, who use many different types of commercially available instruments, obtained a wide range of spectra of copper. Each spectrum was transferred to the Common Data Processing System. The energy dependence of each instrument was evaluated by the comparison of the spectrum with the 'standard' spectrum registered in the System. It became clear that the energy dependence of the sensitivity of the instruments which use CMA as an energy analyzer is explained mainly as the reflection of the energy dependence of electron multiplier. As a result, it is concluded that the energy dependence of sensitivity of the instruments is well explained by simulating the process of the cascade of secondary electron emission.
