Characterization of XPS 'Secondary-Standard' Spectra for the COMMON DATA PROCESSING SYSTEM

Abstract

To take the first step toward sharing the X-ray photoelectron spectra obtained by using different types of instruments, characterization of the energy dependence of the intensity scale of the XPS apparatus with the double-pass CMA as an energy analyzer has been made. For the characterization of the apparatus two independent methods were utilized. One is to use the relation between a peak area intensity and a retarding ratio, and the other is to use the 'standard' Auger spectrum in the COMMON DATA PROCESSING SYSTEM as a reference spectrum. In each of the methods, the energy dependence of E^-1.0, which corresponds to the calculated value from the principle, was obtained. Therefore, in order to get the energy dependence of the intensity scale of many different instruments, we propose to use the spectra obtained by the apparatus as the 'secondary-standard' XPS spectra in the COMMON DATA PROCESSING SYSTEM.