1996 Volume 17 Issue 8 Pages 436-439
Dissociative scattering of molecular SiF3+ and SiF+ ions from a Cu (100) single crystal surface has been investigated in the incident energy range from 5 eV to 200 eV with a scattering angle of 77°. The ion intensities of dissociatively scattered ions and parent molecular ions were measured as a function of incident ion energy. The observation showed that the onset energies for the dissociation of SiF3+ and SiF+ ions are 30 eV and 40 eV, respectively, within a precision of ±2 eV. The obtained values are consistent with an impulsive collision model where dissociation of incident ion is caused by vibrational excitation during the collision.