Surface Structure of Diamond Homoepitauial Film

Abstract

Surface observation by scanning tunneling microscopy and electron diffraction is capable of providing atomic order information for diamond homoepitaxial films grown by chemical vapor deposition. For diamond {001} homoepitaxial films, a 2×1 structure was mainly observed. The structure suggests growth via dimer row extension. For diamond {111} films, 1×1 periodicity and a local √3×√3 structure were observed. The formation of spiral steps suggests Frank-type growth due to screw dislocation.