CHEMICAL REACTION BETWEEN PLASMA AND SURFACE

Abstract

For understanding chemical process in the interaction between a plasma and a solid surface, the formation and reaction of the plasma state is studied. The plasma state was identified by the emission and mass spectroscopies and the electrical probe techniques.
The Nitriding of metals, such as titanium, steel and silicon, with nitrogen and nitrogen-hydrogen plasmas was discussed as an example. The main species observed in the nitrogen plasma were nitrogen molecules and molecular ions in excited states. By the addition of hydrogen into the nitrogen plasma, nitrogen-hydrogen molecules were formed. In every case. the nitriding reaction was considerably exchanged by the addition of hydrogen. The effect of the addition of hydrogen is briefly discussed.