Diamond like Carbon Films Obtained by Ionized Deposition

Abstract

Very hard diamond like carbon films have been prepared by applying the ionized deposition technique, and the growth mechanism of the film in the case of methane gas is discussed. Properties of these carbon films obtained are as follows. Micro Vickers hardness dependis on the deposition conditions such as substrate potential, temperature, and ionization rate, but in some conditions, the hardness shows a larger value than that of silicon and sapphire. The resistivity and dielectric constant are close to those of diamonds. The electron diffraction pattern from the (111), (220), and (311) planes can be observed clearly, and the results show that the crystal structure calculated from these rings is very close to the diamond structure.