Auger Electron Spectroscpy

Abstract

Fundamental aspects of Auger electron spectroscopy are reviewed. This review covers : the history of Auger electron spectroscopy, the electron impact ionization cross section of an atom, the relation between Auger electron yield and x-ray fluorescence yield, the inelastic mean free path of an electron in a solid, the energy of an Auger electron, the fine structure of the Auger spectrum, the chemical state effect and the effect of density of states of the valence band on the Auger spectrum, quantitative analysis using Auger spectroscopy, and the differential spectroscopic method.