Abstract
Principles of AES (Auger Electron Spectroscopy), SAM (Scanning Auger electron Microscope), EPMA (Electron Probe Micro Analyzer), XPS (X-ray Photoelectron Spectroscopy), and UPS (Ultraviolet Photoelectron Spectroscopy) are briefly described. Examples for study of interface using these techniques are also described. Advantages, disadvantages and limitations of these are pointed out.
