Hyomen Kagaku
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
Preparation of Ultrafine AlN Particles by “Nitrogen Plasma-Aluminium” Reaction
Satoru OHNO
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1987 Volume 8 Issue 5 Pages 380-383

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Abstract
Ultrafine powders of AlN and (AlN+Al) were produced by arc melting of Al in atmospheres of N2+Ar and N2+NH3 at 0.1MPa. It was found that the rate of nitriding of Al in this process increased markedly with increasing NH3 partial pressure in nitrogen atmosphere.
This paper describes the formation mechanism and some properties of ultrafine AlN particles.
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© The Surface Science Society of Japan
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