Quantification of Auger Electron Spectroscopy by Spectrum Synthesis Method

Abstract

The curve synthesis method based on the non-linear least-squares fitting was applied to the quantitative analysis of Auger electron spectroscopy. The characteristics of the present method are that it pemits the automatical correction of energy deviation between reference and observed spectra and thus the fit becomes better than in the usual least-squares treatment. Examples using an alloy surface show that the present mehtod is useful even in the case that the conventional method of measurement of peak-to-peak values was unsuccessful. Furthermore, the development of a universal method for the analysis of Auger data was discussed.