Abstract
In laminar flow type clean room. an air flow is disturbed by apparatus and operators
It is required urgently to clarify the turbulence characteristic around them. A scale model of laminar flow typ e clean room was used to visualize the air flow pattern within it. A laser light sheet and fine magunesium carbonate powder were adopted as the light source and the particle tracer respectively. Scattering light of tracer particles was taken into picture and the turbulent flow was analyzed. Various dimensions of rectangular prism models were used as symplified apparatus. By changing the arrangement of these apparatus in the model room, the basic design data were obtained. those were useful for predicting and controlling the contamination distribution in laminar flow type clean rooms.
