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Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
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Ultrahigh Speed Etching of SiO2 and Fabrication of Carbon Nanotubes Using Microwave Excited Non-equilibrium Atmospheric Pressure Plasma
Koji YAMAKAWA, Masaru HORI
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2005 Volume 48 Issue 2 Pages 51-56

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© 2005 by The Vacuum Society of Japan
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