Abstract
We observed the LEED patterns of Fe silicide produced by solid phase epitaxy (SPE) on Si(111) surface. Besides 1×1 and 2×2 LEED pattern observed before, c(8×4) pattern with 575°C annealing after Fe1.5ML deposition at room temperature, 2×2+√3×√3 pattern with 550°C annealing after 5ML deposition and c(4×2) pattern with 550°C annealing after 10 ML deposition were newly observed. Then we acquired I-V curves (Intensity-Energy curve) of typical LEED pattern. To evaluate the reliability of the I-V curve, we compared them each other to be sure the symmetry on the three-fold symmetrical surface and to evaluate the structure change with elevating the annealing temperature. The similarity was evaluated by Pendry's R-factor value. From the experimental result, the I-V curves that can be endured to the structure analysis were obtained.
