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Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
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Evaluation of Partially Sulfurized Titanium Oxide Thin Film by Surface X-ray Diffraction
Takahiro NAKAMURA, Eiichiro MATSUBARA, Atsushi MURAMATSU, Nobuaki SATO, Jyunji SAIDA, Shunichi SATO
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2006 Volume 49 Issue 2 Pages 114-119

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© 2006 by The Vacuum Society of Japan
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