Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Review
Application of Transport Simulation of Sputtered Atoms
Toshinari YAMAZAKIToshio YOSHIZAWA
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2006 Volume 49 Issue 9 Pages 547-551

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© 2006 by The Vacuum Society of Japan
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