Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Reviews
Modification of Film Structure in Sputtering Process
Naoto KIKUCHI, Eiji KUSANO
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2007 Volume 50 Issue 1 Pages 15-21

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© 2007 by The Vacuum Society of Japan
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