Abstract
The operating property at the middle temperature regions from 800°C to 600°C of a single solid oxide fuel cell (SOFC) having a samaria doped ceria (SDC) electrolyte film was studied based on the dependence on the film thickness of SDC electrolyte film grown by the helicon wave excited plasma sputtering. The crystal structure of the sputtered SDC film indicated a columnar one with the lower X-ray diffraction intensity such as being independent of the film thickness. The cell resistance became small at a single cell having thin SDC electrolyte film. Open circuit voltage of a single cell indicated maximum value at the operating temperature of 600°C.
