Development and Application of Micro-beam Nuclear Reaction Analysis for Observation of Hydrogen Distribution

Abstract

  A microscope for hydrogen has been developed by means of micro-beam nuclear reaction analysis. The resonance nuclear reaction between proton and ¹⁵N accelerated up to ~6 MeV is used. The micro-beam of ¹⁵N ion was made by a glass capillary, which has a taper shape. Against this focused ¹⁵N ion beam, samples are scanned perpendicularly to the beam direction by stepping motors. As an application of the microscope, a patterned Y thin film covered by Pd thin film was prepared, and the sample was exposed to 1 atm hydrogen atmosphere over a night. The hydrogen distribution in this sample was investigated by using a glass capillary, which has an exit with the 50 μm diameter. As a result, a profile of nuclear reaction analysis, indicating that the hydrogen atoms are concentrated in the patterned Y thin films, was taken.