SHINKU GIJUTSU
Online ISSN : 1883-7182
ISSN-L : 1883-7182
A vacuum furnace for single crystal pulling from a melt.
Shingo IWASE
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JOURNAL FREE ACCESS

1954 Volume 5 Issue 3 Pages 236-244

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Abstract
A vacuum furnace using a molybdenum heater for use in pulling single crystals of germanium from a melt is described. It has a pulling rod with rotation two removable impurity adders a adjusting rod for crucible base and could be observed during the run through windows with shutters.
The vacuum system consisted of a 4″oil diffusion pump of the speed of 100l/sec and a 500l/min mechanical pump and the vacuum higher than 5×10-5mmHg was maintained during operation
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© The Vacuum Society of Japan
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