Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Quartz Crystal Microbalance Applicable to the Chemical Reactions of Thin Metal Films
Yasuo HASEGAWAMakoto SHIOJIRIShoichi MATSUMURA
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1970 Volume 13 Issue 9 Pages 296-302

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Abstract
A quartz crystal microbalance whose stability is better than 2×10-7/day has been constructed for measurements of weight changes due to chemical reactions. The sensitivities for mass determination of 5 MHz and 3.58 MHz quartz crystals used are respectively 5. 64 × 107 Hz/ (g/cm2) and 2. 89×107 Hz / (g/cm2). Its oscillator circuits, some new attachments and techniques for the present apparatus are detailed. Some examples of the weight gain data are presented for the reactions of gases with vacuum-deposited metal films.
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© The Vacuum Society of Japan
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