Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
On the Basic Characteristics of the New Ionization Gauge
Yasuo FUJIIHiroshi MIMAKunio YAGIFutoshi KANEMATSU
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1978 Volume 21 Issue 5 Pages 168-173

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Abstract

A new ionization gauge designed to intercept the direct soft X-ray injecting to the ion collector has been tested. It was found that the sensitivity of this gauge was considerably high in comparison with that of the conventional B-A gauge. Collector current vs pressure characteristic war linear over the range of the pressure from 1×10-9 4×10-1 Torr. It could be expected that this gauge may be used in the range of XHV.

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© The Vacuum Society of Japan
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