High Dose Implantation of Au+ and Cu+into Si Substrate Direct Synthesis of Si-Au, -Cu Alloys

Shinku

Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516

High Dose Implantation of Au⁺ and Cu⁺into Si Substrate

Direct Synthesis of Si-Au, -Cu Alloys

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1978 Volume 21 Issue 7 Pages 219-223

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