Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Apparatus for Ultrahigh Vacuum UV Photoemission Spectroscopy and its Application to Studies of Clean and Gas (O2 and H2O) Covered Si (111) Surfaces
Kenzo FUJIWARAHitoshi OGATA
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1979 Volume 22 Issue 8 Pages 274-280

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Abstract
An apparatus has been constructed for uv photoemission spectroscopy (UPS), which can be used for solid surface analysis under ultrahigh vacuum conditions. A light source consists of a discharge resonance lamp and a differential pumping system. When He I light at 21.2 eV was used, the experimental results showed that a differential pressure of about 109 was obtained between a lamp room and a specimen chamber. Examples of UPS spectra have also been provided for the clean Si (111) 7 ×7 surface and 2O and HO2 chemisorbed Si (111) surfaces. These spectra demonstrate the intrinsic surface state, the valence-band structure and the O2 and H2O chemisorption-induced surface electronic structures. The UPS results for H2O chemisorption revealed that H2O molecules nondissociatively adsorb on the Si (111) 7 × 7 surface, in agreement with previous results by electron energyloss spectroscopy.
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