Performance of Spiral Grooved Gas Dynamic Seals in the Free Molecule Flow Regime

Shinku

Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516

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Volume 24 (1981) Issue 4
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Performance of Spiral Grooved Gas Dynamic Seals in the Free Molecule Flow Regime

Tadashi SAWADA, Hirohisa MORIKAWA

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1981 Volume 24 Issue 4 Pages 181-184

DOI https://doi.org/10.3131/jvsj.24.181

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© The Vacuum Society of Japan

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