Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Measurement of Sputtering Yields of Insulator Films using a Quartz Crystal Oscillator
Masaya YAMASHITAShigeru BABAAkira KINBARA
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1981 Volume 24 Issue 4 Pages 227-229

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© The Vacuum Society of Japan
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