Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Development of Ultra High Vacuum Gate Valves with Polyimide Resin Plate Seal and Measurement of their Performance
Kenji YOKOKURA, Minoru KAZAWA
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1981 Volume 24 Issue 7 Pages 399-407

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