Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Ion-Induced Sputtering
Yasumichi YAMAMURARyuichi SHIMIZUHazime SHIMIZUNoriaki ITOH
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1983 Volume 26 Issue 2 Pages 69-87

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© The Vacuum Society of Japan
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