Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Influence of Magnetic Field on Turbomolecular Pumps
Akihiko NISHIDEShyoichi HASHIMOTOMasashi IGUCHIShigeru KANETOHisashi OIKAWAOsamu YAMASHITAYuzuru NEYATANIKatsumi KITAHARATakayuki OSHIMASuzumu SHIMAMOTO
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1984 Volume 27 Issue 5 Pages 419-421

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© The Vacuum Society of Japan
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