Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Development of New Molecular Pump (II)
Shigeru KANETOMasao NAGAKUBOMasashi IGUCHITachuji IKEGAMIHisashi OIKAWA
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1984 Volume 27 Issue 5 Pages 425-428

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© The Vacuum Society of Japan
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