Influence of Operating Conditions on the Accuracy of a Spinning Rotor Gauge

Abstract

The influence of operational conditions of a spinning rotor gauge on its accuracy was studied in order to clarify the performance of the gauge as a transfer standard gauge or a secondary standard gauge. The lower limit of measuring pressure of the gauge was affected by its offset pressure resulting from setting angle of the sensor, external vibration and thermal effects. One of the thermal effects on the offset pressure, which was evident just after starting of operation, was explained from the temperature change of the sensor head. The gauge sensitivity in high pressure region was measured by using a diaphragm gauge as a reference gauge. It was confirmed that the accuracy of the spinning rotor gauge was kept 1% between 10^-3 to 10 Pa for long term.